STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page 115
5
SERIAL COMMUNICATION PROTOCOL
Parameter
Item Data format Remarks
11
Pump Overload Warning
Rotational speed setting
16-bits hexadecimal
coded ASCII
Default 0000
hex
(0.0%)
12 Serial communication
time out setting (Unit: sec.)
16-bits hexadecimal
coded ASCII
Default 003C
hex
(60 sec.)
13 [System reservation] 88-bits hexadecimal
coded ASCII
*2
*1 Valid only with TMS specification
*2 Assign the parameter value Fhex or the reading data of ReadOptionFunc (?=)
Refer to Table 29, "Parameter setting value" for each parameter setting value.
The value is not reflected when a parameter is out of a setting range.
Example:
1. Input operation port: 01
hex
= I/O REMOTE
2. TMS Option: FF
hex
= DISABLE
4. Second Damage Limit Option: 00
hex
= ENABLE
5. First Damage Limit Warning: 00
hex
= ENABLE
6. Pump Runtime Over Warning: FF
hex
= DISABLE
7. Pump Runtime Over Warning hours: 000003E8
hex
= 1,000 (×100 hours)
8. Imbalance Warning: 00
hex
= ENABLE
9. Pump Overload Warning: FF
hex
= DISABLE
10. Pump Overload Warning Motor current: 03E8
hex
= 1,000 (×0.1%)
11. Pump Overload Warning Rotational speed: 0000
hex
= 0 (×0.1%)
12. Serial communication time out: 003C
hex
= 60 sec.
Parameter
1 2 3 4 5
ASCII 0
1
F
F
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
0
0
0
0
HEX 30
31
46
46
30
30
30
30
Parameter
6 7 8
ASCII F
F
0
0
0
0
0
3
E
8
0
0
HEX 46
46
30
30
30
30
30
33
45
38
30
30
Parameter
9 10 11 12 13
ASCII F
F
0
3
E
8
0
0
0
0
0
0
3
C
*1
*1
*1
*1
*1
*1
HEX 46
46
30
33
45
38
30
30
30
30
30
30
33
43