STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page 20
INSTALLATION
3
The STP pump should be installed in an area which meets the following requirements:
Ambient temperature 0 to 40 °C (32 to 104 °F)
Ambient relative humidity 30 to 95% (no dew condensing)
Environment
An area free of externally applied mechanical shock.
A place free of a heat source (Keep clear of the heat source or
attach a thermal shield plate).
A place free of a strong magnetic field (Range: up to 15 mT (150
G) in the axial direction, and up to 3 mT (30 G) in the radial
direction with respect to the rotational axis of the STP pump).
A place free of a strong electric field.
A place free of exposure to radiation.
No discharge of high voltage (more than 500 V) (If more than 500
V is discharged, contact Edwards).
Others: An area free of exposure to direct sunlight, high humidity,
dust, water drop, salty air, explosive or flammable gas, corrosive
gas, excessive vibration and sources of electric noise.
A place at an altitude of 2,000 m or less.
STP pump installation
equipment conditions
Install the STP pump securely so that foreign materials cannot fall
into the STP pump (Ex.: Si wafers or samples are positioned above
the STP pump) (To prevent foreign materials from falling into the
STP pump, design a shield plate with large conductance).
Install the STP pump so that the inlet flange of the STP pump not to
be exposed to heat source. (Install the heat shield plate so as to
prevent the effect by radiation heat)
Good example:
Heat shield plate
Bad example:
None
Table 1 - Environmental requirements for installation
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