Edwards STP-iS2207 Series

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STP-iS2207 Series Turbomolecular Pump

MT-89E-001-C

Page

OPERATION

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Table of Contents3
Introduction11
Scope and Definitions11
Applied Standards12
Limited Warranty13
Warranty Period13
Item Warranted13
Disclaimer14
Spare Parts14
Precautions for Safe Operation of the STP Pump15
Usable Gases15
Maintenance and Inspection Precautions16
Labels16
STP Pump Installation Warning Label16
Hot Surface Warning Label16
Heavy Product Caution Label17
High Voltage Device Caution Label17
Operation Principle of the STP Pump18
STP Pump Specification20
Technical Data21
STP Pump Specifications21
Maximum Gas Flow-Rate22
Water Cooling Use Condition23
Control Unit24
External Appearance of the STP Pump26
External Appearance of STP-Is220726
External Appearance of STP-Is2207C27
Label Affixing Positions28
Installation of the Stp Pump29
Precautions before Installation29
Operating Environment29
Installation Area31
Space Around the STP Pump31
Bench32
Insulation Test32
Unpacking and Installation33
Example of Lifting the STP Pump33
Eye Nut Size33
Example of Lifting the STP Pump (Horizontal Positioning)34
STP Pump with Eyebolts36
Name and Function of each Part37
Name and Function of the Pump37
Configuration of the STP Pump37
Control Unit (Front Panel)37
Pump Functions37
Name and Function of the Control Unit38
Control Unit Front Panel Functions40
Control Unit Front Panel Functions (Continued)41
How to Install the STP Pump42
Installation of the STP Pump to the Vacuum Equipment42
Cleaning the Seal43
STP Pump Installation Positions44
Positions of the Outlet Port on the Horizontally44
Secure the STP Pump45
Tightening Torque of Bolt45
Maximum Torque Predicted and Recommended Securing Bolt46
Legs for Securing the Base49
Screw Holes for Securing the Base49
Power Cable50
How to Connect the Power Cable52
Precautions of Vacuum Piping54
Vacuum Piping Method55
(For the STP Pump Equipped with Purge Port)55
Height of Purge Port55
Connecting the Water Cooling Pipe56
Positions of the Cooling Water Port56
Attaching a Baking Heater57
Connecting to Semiconductor Equipment58
Connecting to Power58
Emergency off Circuit (EMO Circuit)58
Operation59
Gas Pumping, Cooling and Baking the STP Pump59
Gas Pumping59
How to Introduce a Purge Gas60
Cooling the STP Pump60
Water-Cooling Method60
Baking the STP Pump61
Before Starting the STP Pump62
Confirmation before Starting62
Confirmation of Vacuum System62
Powering on63
Pump Operation63
Input Operation Port Setting63
Starting/Stopping the STP Pump64
Pump Operation Method64
Starting/Stopping the STP Pump (X2 REMOTE)64
How to Start/Stop the STP Pump65
Starting the STP Pump after Stopping65
Starting the STP Pump after a Safety Function Operates65
Powering off65
Reset Operation (X2 REMOTE)65
Led66
Parallel Port Input/Output Signal67
Input Signal Pins67
X2 REMOTE Connector67
X2 REMOTE Input Signal Pins68
X2 REMOTE Input Signal Pins (Contact Input)69
Input Operation Port Setting70
Second Speed Option71
Output Signal Pins72
X2 REMOTE Output Signal Pins74
Serial Communication Protocol77
Introduction77
Serial Port77
Connection and Setting up78
Signal Connection78
X3 Pin Position78
Connecting the RS48580
Communication Parameter Setting81
Communication Parameters81
Input Operation Port Setting82
Input Operation Port82
Serial Communication Timeout Setting83
Serial Communication Time out Setting83
Recommended Items about Communication Cable Installation84
Grounding Example (both Ends Grounding)84
Grounding Example (Single Point Grounding)84
Protocol Specifications87
General Description87
Standard Transmission Frame (in the RS232/RS485 Single Point Connection)88
(In the RS232/RS485 Single Point Connection)89
Query Command90
(In the RS232/RS485 Single Point Connection)90
Transmission Data Format91
Frame Control (Checksum)92
Error Control92
Transmission Frame in the RS485 Multi-Point Connection92
Control Command in the RS485 Multi-Point Connection94
5.3.10 Query Command in the RS485 Multi-Point Connection95
5.3.11 Broadcasting Command in the RS485 Multi-Point Connection96
Pump Operation Commands96
5.3.12 Application Note97
Example of Answer Resending Process98
Example of Command Sending During Answer Data Reply98
Command Specifications101
Command List101
Readmeas102
Command102
Readfailmess103
Pump Operation Commands103
Error Message Values106
Readmodfonct107
Pump Operation Mode108
Readversion109
Readcounters110
Readsetpoint111
Readmotortemp111
5.4.10 Readstatus112
5.4.11 Readevents113
Remote Mode113
5.4.12 Setspeedsetpoint114
5.4.13 Readspeedsetpoint115
5.4.14 Readmodfonctwithwarning116
Warning Value Bit Assign117
5.4.15 Readmeasvalue119
5.4.16 Readoptionfunc121
Input Operation Port Setting121
5.4.17 Setoptionfunc124
5.4.18 Readcondition126
5.4.19 Readeventswithtime128
5.4.20 Setoptions132
Second Speed Option Setting132
Option Function Number and Parameter List132
5.4.20.2 Second Speed Selection133
5.4.21 Readoptions134
5.4.21.1 Second Speed Function Setting134
5.4.21.2 Second Speed Select135
Stp-Link and Display Unit137
STP-Link137
Display Unit138
Safety Functions139
Power Failure139
Operation after a Power Recovery140
Abnormal State of Magnetic Bearing (Disturbance)141
Excessive Vibration (Disturbance)141
Motor Driver Overload (DRV Overload)141
Overheating Inside the STP Pump (MOTOR Overheat)141
Overheating Inside the Control Unit (CNT Overheat)141
Overspeed142
WARNING" Function142
WARNING Function142
Contents of WARNING Function144
First Damage Limit144
Second Damage Limit144
Pump Run Time over144
Pump Overload145
Imbalance145
Other Warning145
WARNING Function Setting146
Default Setting of WARNING Function146
Factory Setting and Variable Range146
Troubleshooting Immediately after Failure Occurs147
After Power Failure147
After Other Abnormality/Error147
Troubleshooting148
Indication of "FAILURE" LED (Red)148
Indication of "FAILURE" LED (Red)154
No Indication of the "FAILURE" LED154
Maintenance and Inspection155
Cleaning156
Inspecting the Deposit156
Maintenance157
Recommended Overhaul Intervals157
Standard Replacement Parts157
Recommended Maintenance Intervals for Main Parts158
Transporting for Repair or Overhaul159
Storage and Disposal161
Storage of the STP Pump161
Disposal162
Service, Spares and Accessories163
Introduction163
Service163
Spares163
Accessories164

Edwards STP-iS2207 Series - Page 76

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