List of Figures
iv User Guide
List of Figures
Figure 1: System components .............................................................................. 13
Figure 2: Elements of the laminar flow box ........................................................... 15
Figure 3: Temperature control readout ................................................................. 15
Figure 4: System support ...................................................................................... 17
Figure 5: Operator Panel ...................................................................................... 17
Figure 6: Stage system with optics plane .............................................................. 19
Figure 7: Interferometer function ........................................................................... 21
Figure 8: E-rack components ................................................................................ 22
Figure 9: Orientation of stage and design ............................................................. 23
Figure 10: Machine-related design rotation ........................................................... 23
Figure 11: Rotation of coordinate system on chuck .............................................. 24
Figure 12: Location of coordinate pairs ................................................................. 24
Figure 13: Wizard window overview ..................................................................... 25
Figure 14: Unloading options in Standard Mode and Series Mode ....................... 60
Figure 15: Camera window ................................................................................... 65
Figure 16: BSA marker zones overview ................................................................ 69
Figure 17: Orientation on wafer for BSA ............................................................... 70
List of Tables
Table 1: Field of view (top side, back side) ........................................................... 20
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