6 Job Setup
User Guide 61
Removing the substrate from the chuck
To remove the substrate from the chuck, follow the steps below:
Push the window button and release it again. The window opens.
At the operator panel switch off the vacuum.
Carefully take the substrate off the chuck and stow it in an opaque box
impermeable to light.
Close the window by pushing and releasing the button. If required, click OK in the
Exposure Wizard to close the unloading dialog.
Non-safe light may only be switched on when all
substrates are stored in boxes impermeable to light.
Otherwise, the substrates become useless.
This user guide does not give instructions on substrate processing. Processing of
the substrate should happen according to the substrate manufacturer's
recommendation.
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