7 System Utilities and Tools
64 User Guide
A positive number brings the laser focus closer to the surface, exposing deeper into the
resist.
The Stage Control frame provides arrow buttons for moving on the substrate surface.
Every click is one movement. They are also used for fine positioning.
To determine the kind of movement, you can switch between continuous movement
(jogging) and stepwise movement by clicking into the corresponding field. In jog mode,
change the driving speed [µm/s] either by using the slider or by clicking into the value
field and entering the speed manually. Alternatively, click into the slider field and use the
arrow keys for setting the speed. In step mode, enter the step size [µm] for X and Y
direction. The arrow buttons for navigation on the substrate surface change their
appearance according to the selected mode. This contributes to a fast identification of
the mode currently selected.
The Set Zero button allows to set an arbitrary point as zero coordinates. With Move To
Zero it is possible to go to the zero point set before. Clicking Substrate Center allows
to move the field of view to the center of the substrate. To stop any stage movement,
make use of the Stop button.
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