Inficon UL3000 Fab ULTRA - Page 102

7 | Warning and error messages INFICON
102 / 152 UL3000-Fab-ULTRA-Operating-instructions-iinb73en1-09-(2109)
Type Notification Possible sources of
error
Remedy
W302 Suppressor voltage too low Short circuit of
suppressor or
preamplifier
• Contact customer service
VI-Board or MSB
defective
• Contact customer service
W303 Suppressor voltage too high MSB defective • Contact customer service
W304 Anode-cathode voltage too
low
Short circuit between
anode and cathode
• Contact customer service
VI-Board or MSB
defective
• Contact customer service
W305 Anode-cathode voltage too
high
MSB defective • Contact customer service
E306 Anode voltage incorrect The anode voltage set
value is outside the
allowable range
• Perform a calibration
• Contact customer service
MSB defective • Contact customer service
W310 Cathode 1 broken Cathode defective • Check that the other cathode has been
switched on
• Contact customer service
Connection to cathode
broken
• Contact customer service
VI-Board or MSB
defective
• Contact customer service
W311 Cathode 2 broken Cathode defective • Check that the other cathode has been
switched on
• Contact customer service
Connection to cathode
broken
• Contact customer service
VI-Board or MSB
defective
• Contact customer service
E312 Cathodes broken Both cathodes
defective
• Contact customer service
Connection to cathode
broken
• Contact customer service
VI-Board or MSB
defective
• Contact customer service