Inficon UL3000 Fab ULTRA - Page 103

INFICON Warning and error messages | 7
UL3000-Fab-ULTRA-Operating-instructions-iinb73en1-09-(2109) 103 / 152
Type Notification Possible sources of
error
Remedy
E340 Emission error Pressure too high with
aged cathode
• Contact customer service
W342 Cathodes not connected Both cathodes
defective during self-
test
• Contact customer service
Plug of ion source not
connected
• Contact customer service
W350 Suppressor not connected Suppressor cable not
connected or defective
• Contact customer service
E352 Preamplifier not connected Preamplifier defective
or cable not connected
• Contact customer service
W358 Alternate preamplifier
ranges
Preamplifier defective • Contact customer service
Unusual leak rate
waveform
• Contact customer service
W359 Overdriven preamplifier Ion source or
preamplifier defective
• Contact customer service
Mass spectrometer
contaminated
• Contact customer service
W360 Preamplifier output signal
too low
Ion source defective • Contact customer service
Mass spectrometer
contaminated
• Contact customer service
W361 The offset voltage of the
preamplifier is too high
Preamplifier defective • Contact customer service
W362 Preamplifier range error Preamplifier defective • Contact customer service
MSB defective • Contact customer service
W390 500 GOhm amplifier resistor
out of range
Preamplifier defective • Contact customer service
MSB defective • Contact customer service
E400 TMP error message Unhandled error
message from the TMP
• Contact customer service
W401 TMP warning message Unhandled warning
message from the TMP
• Contact customer service
E402 No communication with
turbo pump converter
TMP cable defective or
not connected
• Contact customer service
TMP converter
defective
• Contact customer service
MSB defective • Contact customer service