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Inficon UL3000 Fab ULTRA - Page 104

Inficon UL3000 Fab ULTRA
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7 | Warning and error messages INFICON
104 / 152 UL3000-Fab-ULTRA-Operating-instructions-iinb73en1-09-(2109)
Type Notification Possible sources of
error
Remedy
E404 TMP current consumption
too high
Pressure in the TMP is
too high
Contact customer service
W405 No TMP run-up Inlet pressure during
run-up too high
Check that the backing pump is working
during run-up
Check that the pressure drops during run-
up
Contact customer service
TMP bearing damage Contact customer service
E410 TMP temperature too high The ambient
temperature is too high
Turn off the device and let it cool down
Reduce the temperature in the
environment where the device is located
Air filter dirty Clean the air vents or replace the filter
plates
Fan blocked or
defective
Contact customer service
W411 High TMP temperature The ambient
temperature is too high
Reduce the temperature in the
environment where the device is located
Air filter dirty Clean the air vents or replace the filter
plates
Fan blocked or
defective
Contact customer service
W421 TMP voltage too low Power supply to TMP
not sufficient
Contact customer service
E422 No TMP run-up Inlet pressure during
run-up too high
Check that the backing pump is working
during run-up
Check that the pressure drops during run-
up
Contact customer service
TMP bearing damage Contact customer service
E423 TMP pressure rise Inrush of air into TMP Contact customer service
E450 Temperature of TMP2
converter too high
The ambient
temperature is too high
Reduce the temperature in the
environment where the device is located
Fan blocked or
defective
Contact customer service
TMP2 converter
defective
Contact customer service

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