Inficon UL3000 Fab ULTRA - Page 107

INFICON Warning and error messages | 7
UL3000-Fab-ULTRA-Operating-instructions-iinb73en1-09-(2109) 107 / 152
Type Notification Possible sources of
error
Remedy
E463 Temperature error of
backing pump
The ambient
temperature is too high
• Reduce the temperature in the
environment where the device is located
Fan blocked or
defective
• Contact customer service
Ambient temperature is
too low
• Increase the temperature in the
environment where the device is located
Temperature sensor of
backing pump is
defective
• Contact customer service
E464 Power consumption of
backing pump too high
Exhaust connection
sealed
• Make sure that the exhaust hose is
correctly connected
Heavy duty operation • Contact customer service
E465 Incorrect flow direction in
backing pump
Gas flow into device
due to pressure at
exhaust connection
• Remove the pressure from the exhaust
connection
E466 Run-up error of backing
pump / rotation speed too
low
Exhaust connection
sealed
• Make sure that the exhaust hose is
correctly connected
Backing pump
defective
• Contact customer service
E467 Overload protection of
backing pump
Exhaust connection
sealed
• Make sure that the exhaust hose is
correctly connected
Backing pump
defective
• Contact customer service
W468 Unhandled warning
message of backing pump
Unhandled error
message from the
backing pump
• Contact customer service
E500 Pressure sensor p1 not
connected
Pressure sensor not
connected or cable
defective
• Contact customer service
VI-Board or MSB
defective
• Contact customer service
E502 Pressure sensor p2 not
connected
Pressure sensor not
connected or cable
defective
• Contact customer service
VI-Board or MSB
defective
• Contact customer service