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Inficon UL3000 Fab ULTRA - Page 108

Inficon UL3000 Fab ULTRA
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7 | Warning and error messages INFICON
108 / 152 UL3000-Fab-ULTRA-Operating-instructions-iinb73en1-09-(2109)
Type Notification Possible sources of
error
Remedy
E504 Pressure sensor p3 not
connected
Pressure sensor not
connected or cable
defective
Contact customer service
VI-Board or MSB
defective
Contact customer service
E505 Pressure sensor p4 not
connected
Pressure sensor p4 is
not inserted into the VI-
Board
Contact customer service
VI-Board or MSB
defective
Contact customer service
E520 Pressure too high Pressure p2 too high
for at least 15s
Contact customer service
E521 Pressure rise, anode voltage
collapsed
Pressure rise at
pressure sensor p2 and
anode voltage
collapsed
Contact customer service
W522 Pressure rise, emission
collapsed
Pressure rise at
pressure sensor p2 and
emission collapsed
Contact customer service
W540 Flow through capillary is too
low! Leaks may not be
detectable
Filter is dirty Replace the sniffer tip filter
Sniffer tip or capillary
blocked
Remove the blocking of the sniffer tip
Use another sniffer line, if possible
Contact customer service
The pressure limit for a
blocked capillary is set
too high
Check and change the pressure limit, if
necessary
W541 Flow through capillary is
much too low! Leaks may
not be detectable
Filter is dirty Replace the sniffer tip filter
Sniffer tip or capillary
blocked
Remove the blocking of the sniffer tip
Use another sniffer line, if possible
Contact customer service
The pressure limit for a
blocked capillary is set
too high
Check and change the pressure limit, if
necessary

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