Table of contents
FIDAMAT 6
Operating Instructions, 01/2019, A5E00222135-04
7
A Appendix............................................................................................................................................. 175
A.1 Technical support .................................................................................................................. 175
A.2 Return procedure .................................................................................................................. 176
A.3 ESD guidelines ..................................................................................................................... 176
A.4 Overview of operating functions ........................................................................................... 178
A.5 Wiring diagrams .................................................................................................................... 180
A.5.1 Motherboard pin assignments .............................................................................................. 180
A.5.2 Plug connector assignment of the optional board and PROFIBUS ...................................... 181
A.5.3 Gas flow of the FIDAMAT 6-E .............................................................................................. 182
A.5.4 Gas flow of the FIDAMAT 6-G .............................................................................................. 183
B List of abbreviations ............................................................................................................................ 185
B.1 List of abbreviations .............................................................................................................. 185
Glossary ............................................................................................................................................. 189
Index................................................................................................................................................... 197
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