Synrad FH FLYER

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SYNRAD FH Series Flyer Operator’s Manual Version 3.4

Connecting

Table 1-3 Gas purity specications

Purge Gas Specication

Nitrogen High Purity Grade 99.9500% purity or better

Air Breathing Grade 99.9996% purity or better

Air Compressed 99.9950% purity or better, water-free; oil ltered to

5 mg/m3 or better; particulate ltered to < 1.0 micron

Synrad FH FLYER - Page 48