Ulvac RFP-N - Page 102

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RF POWER SUPPLY and MATCHINGBOX

9. Reference Materials

Figure 9-5 MBX-1305N/MBX-1310N outline drawing

4×M4

10-M6

10-M6_Depth_10mm

Main Page

Table of Contents7
For Safe Operation9
Precautions When Handling the System9
Warning Labels/Nameplate10
Contact Information10
Overview11
Introduction11
Features11
System Configuration12
Cooling Water Quality Standard14
Individual RF Generator Specifications15
Common RF Generator Specifications19
Individual Controller Specifications21
Individual Matching Box Specifications22
Common Matching Box Specifications26
Setup27
Checking the Accessories27
RF Generator Installation28
RF Generator Mounting Structure29
RF Generator Installation Environment30
Matching Box Installation31
Matching Box Installation Method31
In the Case of Connector Output33
System Wiring35
Cable Connections35
Input RF Generator Wiring37
Connecting the Earth Terminal38
About the Interlock39
Functions40
Descriptions of RF Generator Functions40
Descriptions of Front Panel Functions40
Descriptions of Rear Panel Functions41
Descriptions of Control Panel Functions45
Descriptions of Protection Functions46
Descriptions of External Control Functions47
Descriptions of Matching Box51
Descriptions of Parameter Functions53
Descriptions of External Control (RS-232C) Functions67
Operation70
RF Generator Operating Procedures70
Turning on the RF Generator70
Local Operation Method (Panel Operation)70
Remote Operation (External Control Operation) Method74
Special Commands76
Matching Adjustment77
Matching Adjustment Overview77
Matching Fundamentals77
Matching Box Internal Adjustment Work79
Adjusting the Number of Coil Short Circuits (MBX-1305N/MBX-1310N)80
Adjusting the Number of Coil Short Circuits (MBX-1330N/MBX-1350N)81
Adding a Fixed Capacitor83
Matching Box Power Derating84
MBX-1310N/MBX-1305N Derating Reference Values84
MBX-1330N Derating Reference Values88
MBX-1350N Derating Reference Values90
Maintenance92
RF Generator Maintenance and Inspection92
Matching Box Maintenance and Inspection94
Troubleshooting95
RF Generator Troubleshooting95
Matching Box Troubleshooting96
Reference Materials97
CE Declaration of Conformity105
People's Republic of China Electronic Industry Standard SJ/T 11364 -2014 (China Rohs2)107

Ulvac RFP-N - Page 102

Table of Contents

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