Zeiss EVO - Page 5

ZEISS Table of Contents
7 Troubleshooting .............................................................................114
7.1 Chamber.............................................................................................................115
7.1.1 Initializing the Stage.............................................................................. 115
7.1.2 Defining the Post Initialization Position of the Stage.............................. 116
7.1.3 Changing the Joystick TV Angle ............................................................ 116
7.1.4 Resetting the Touch Alarm .................................................................... 117
7.1.5 Checking the Temperature .................................................................... 117
7.1.6 Replacing the Chamber Door Seal ......................................................... 117
7.1.7 Adjusting the Isolation Mounts ............................................................. 119
7.2 Column...............................................................................................................120
7.2.1 Baking out the Gun Head...................................................................... 120
7.2.2 Replacing Filaments .............................................................................. 121
7.3 Power Circuit ......................................................................................................147
7.3.1 Checking the Position of the Circuit Breakers ........................................ 147
7.4 PC.......................................................................................................................147
7.4.1 Cleaning up the PC ............................................................................... 147
8 Decommissioning and Disposal.......................................................148
8.1 Decommissioning................................................................................................148
8.2 Transport and Storage ........................................................................................149
8.3 Disposal ..............................................................................................................151
8.4 Decontamination ................................................................................................151
9 Technical Data and Conformity.......................................................152
9.1 Layout and Connections......................................................................................152
9.2 System Layout.....................................................................................................153
9.3 Performance Data and Specifications | EVO 10....................................................153
9.4 Performance Data and Specifications | EVO 15....................................................159
9.5 Performance Data and Specifications | EVO 25....................................................164
9.6 Applicable Standards and Regulations.................................................................169
10 Parts and Tools...............................................................................171
10.1 Consumables ......................................................................................................171
10.2 Spare Parts..........................................................................................................171
10.3 Tools and Accessories .........................................................................................171
Glossary ..........................................................................................173
Index...............................................................................................176
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006 5