Zeiss EVO - Page 176

Index ZEISS
Index
A
Acceleration voltage 27
Accessory 172
Air Conditioning and Quality 154, 159, 164
Alignment
Aperture 80
Gun 79
Analysis mode 29
Aperture 23, 27, 113
Automated function
Auto aperture alignment 80
Auto gun alignment 79
B
Backscattered electron 31, 43
Bakeout 120
Baking out the gun head 120
Beam deceleration 88
BSD detector 43, 85
BSE 43
C
C2D detector 42, 83
C2DX detector 85
Cathodoluminescence 31, 46
CCD camera 37
Chamber door seal 117
Chamberscope 37
Checking
Position of the circuit breaker 147
Temperature 117
Chemical 113
Circuit breaker 147
CL detector 46
Comissioning 56
Compressed Air Supply 156, 161, 167
Consumable 113, 171
Consumable and chemical 113
Contamination 151
Control panel 48
Cover panel, protective 18
D
Decontamination 151
Depth mode 29
Detection System 158, 163, 169
Detector 32, 82
BSD 43, 85
C2D 42, 83
C2DX 85
CL 46
Everhart-Thornley 33
SE 33, 83
STEM 45
VPSE 39
YAG BSD 44, 87
Differential pumping aperture 23
Disposal 148, 151
DPA 23
Dual joystick 47
E
EasyVP mode 23
EHT 27
Electron optical column 27
Electron Optics 156, 162, 167
Emergency shutdown 111
Emitter life 113
Environmental Requirements 156, 161, 167
EP mode 23, 26
Everhart-Thornley detector 33
EVO column 27
Exhaust Line 155, 161, 166
Extended pressure mode 23, 26
F
Faraday cup 81
Field mode 29
Filament 27, 122
Fisheye mode 29
Focus wobble 76
G
General Safety Information 10
GUI 50
Gun head, bakeout 120
H
Hazard
Electrical hazard 11
Generated by materials and substances12
Generated by radiation 13
Mechanical hazard 11
Radiation hazard 13
Thermal hazard 13
Hazards 11
Prevention 11
HD BSD 43
176 Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006