M588-00-880 Issue E
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Installation
3.10 Accessories
The power to the dry pumping system must be switched off when the MCM MicroTIM or active accessory module
is installed or removed. If it is not, these modules may be damaged. Refer to the appropriate accessory manual
for more information.
Refer to the individual accessories manuals for information about installation.
Refer to Appendix A2.14 for instructions on how to set up the MCM MicroTIM using the PDT.
3.11 Commission the dry pumping system
1. Switch on the external electrical supply and check that the power LEDs (Figure 1, item 7 and Figure 3, item 4) go
on. If the LEDs do not go on, contact Edwards.
2. Switch on the cooling water and purge gas supplies.
3. Ensure that the exhaust extraction system is not blocked (for example, that valves in the exhaust extraction
system are open).
4. Ensure that all openings to atmospheric pressure in the foreline vacuum system are closed.
5. Press and hold the local control button (Figure 1, item 5) and check that the green local control LED
(Figure 1, item 6) comes on and then remains continuously illuminated.
6. Press START button (Figure 1, item 3).
7. If the dry pumping system starts and continues to operate, continue at Step 8. If a warning or alarm condition is
indicated:
Shut down the dry pumping system: refer to Section 4.4.
Contact Edwards.
When fitting accessories inside the GXS enclosure, ensure that the pump is switched off and lock
and tag out the electrical supply before removing the enclosure panels.
The surfaces of the dry pump, booster and spools are very hot when the GXS dry pumping system
is running. Allow these surfaces to cool to safe temperatures before installing accessories inside
the GXS enclosure. Be sure to route and secure accessory cables as shown in their individual
installation manuals to prevent cables from resting on hot surfaces.
During some application cycles it is possible that the dry pumping system may exceed OSHA
1910.95 Occupational Noise Exposure Limits, the EU noise directive 2003/10/EC or other regional
noise limits dependent upon the process, duty cycle, installation or environment in which the dry
pumping system is being operated. A sound pressure survey must be conducted after installation
and, if necessary, controls implemented to ensure that the relevant limits are not exceeded during
operation and that adequate precautions are taken to prevent personnel from exposure to high
noise levels during operation.