Edwards SCU-1601

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 145
8
MAINTENANCE
Referred
section
Instruction Manual
(B)
*1 The driver output stops and the rotor continues rotating by inertia.
It may take several hours to stop. To stop the STP pump quickly, close the vacuum valve at the outlet port
flange and
introduce gas from the purge port into the STP pump.
Table
40 - Error
messages after self test (continued)
Countermeasures
1. Contact Service office. 2. Contact Service office.
1. Contact Service office. Contact Service office.
1. Use the
maximum
working pressure or less.
2. Use the allowable backing
pressure or less.
3. Check the vacuum piping
system for leakage.
4. Check the backing
-pump
for its capacity and START state
.
(use a backing
-pump with
the recommended capacity or more)
Contact Service o
ffice.
Contact Service office.
Contact Service office.
Probable causes
1. Wear
-out of the cooling
water bearing
.
2. Failure of the cooling fan
drive circuit
.
1. Short of the STP
connection
cable.
2. STP pump failure.
1. High pressure at the inlet
port.
2. High
pressure at the outlet
port.
3. Leakage of the piping
system.
4. Failure of the
backing
-pump.
Failure of the SCU
-1601.
Failure of the SCU
-1601.
Failure of the SCU
-1601.
Pump operation
Decelerate and stop
.
Free run
.
*1
Decelerate and stop.
Free run
.
*1
Free run
.
*1
Touch down. The magnetic bearing output stops and the rotor is descended on the
touch down
bearing.
Occurrence condition
Cooling fan come to a stop.
Driver over current.
ACCELERATION state continues for approximately 30 minutes.
Driver overvoltage.
Failure of the driver circuit
.
Abnormal CPU operation
.
LCD Messages
Driver FAN Failure
Driver Overcurrent
Driver Overload
Driver Overvoltage
Driver PWM Trouble
DSP Initialize Fail