Edwards SCU-1601

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 146
8
MAINTENANCE
Referred
section
3.11
8.1.1 3.6.5 3.6.5 2.1
Table
41 - Error
messages after self test (continued)
Countermeasures
Contact Service office.
1. Connect the cable
correctly. If the cable is not locked, lock it securely.
2. Set "Leak Valve Option" to
"DISABLE".
1. Check the specifications of
the connected STP pump.
2. Contact Service office.
3. Contact Service office. 4. Contact Service office.
Change the AC input voltage 200 V.
Contact Service office
.
1. Check whether or not a
power failure has
occurred.
2. Connect the power cable
correctly.
3. Replace the power cable. 4. Set the voltage to the rated
voltage
±10%.
Probable causes
Failure of the SCU
-1601.
1. Disconnection of the
emergency vent valve cable.
2. Incorrect setting of the
emergency vent
valve.
1. STP pump is not
compatible with external TMS unit
2. Failure of external TMS
unit
3. Failure of the STP
pump.
4. Failure of the SCU
-1601.
Incorrect connection of the input power supply
.
Failure of the STP
pump.
1. Power failure. 2. Incorrect connection of the
power cable.
3. Failure of the power cable. 4. Insufficient power supply
voltage.
Pump operation
Decelerate and stop.
Decelerate and stop.
Decelerate and stop
Touch down. The magnetic bearing output stops and the rotor is descended on the
touch down
bearing.
Touch down. The magnetic bearing output stops and the rotor is descended on the
touch down
bearing.
Decelerate and stop.
Decelerate and stop.
Occurrence condition
Serial communication failure.
Disconnection of the emergency valve cable.
External TMS Error
Excessive magnetic bearing electric current continues for 30 sec.
Connection of the STP pump not corresponding to the input power
supply
(100 V).
Disconnection of the temperature sensor of the STP pump.
Insufficient power supply.
LCD Messages
DSP->PCB Com Fail
E.valve disconnect
External TMS Fail
Inordinate Current
Insufficient Supply
M_Temp Sensor Lost
Mains Failure