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Edwards SCU-1601 User Manual

Edwards SCU-1601
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SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page iii
PAGE
iii
CONTENTS (CONTINUED)
Section Title Page
5.2.3 Communication parameter setting 78
5.2.4 Recommended items about communication cable installation 79
5.3 Protocol specifications 82
5.3.1 General description 82
5.3.2 Standard transmission frame
(in the RS232/RS485 single point connection) 83
5.3.3 Control command
(in the RS232/RS485 single point connection) 84
5.3.4 Query command
(in the RS232/RS485 single point connection) 85
5.3.5 Transmission data format 86
5.3.6 Frame control (checksum) 86
5.3.7 Error control 87
5.3.8 Transmission frame in the RS485 multi-point connection 87
5.3.9 Control command in the RS485 multi-point connection 88
5.3.10 Query command in the RS485 multi-point connection 90
5.3.11 Broadcasting command in the RS485 multi-point connection 91
5.3.12 Application note 92
5.4 Command specifications 96
5.4.1 Command list 96
5.4.2 ReadMeas 97
5.4.3 Command 97
5.4.4 ReadFailMess 98
5.4.5 ReadModFonct 101
5.4.6 ReadVersion 103
5.4.7 ReadCounters 104
5.4.8 ReadSetPoint 105
5.4.9 ReadMotorTemp 105
5.4.10 ReadStatus 106
5.4.11 ReadEvents 107
5.4.12 SetSpeedSetPoint 108
5.4.13 ReadSpeedSetPoint 109
5.4.14 ReadModFonctWithWarning 110
5.4.15 ReadMeasValue 113
5.4.16 SetOptions 115
5.4.16.1 Second speed option setting 116
5.4.16.2 Second speed selection 117
5.4.17 ReadOptions 118
5.4.17.1 Second speed function setting 119
5.4.17.2 Second speed select 120
5.4.17.3 External TMS unit setting 121
5.4.17.4 External TMS temperature 124
6 STP-LINK 127
7 EDCENTRA 129

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Edwards SCU-1601 Specifications

General IconGeneral
BrandEdwards
ModelSCU-1601
CategoryControl Unit
LanguageEnglish

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