Edwards STP-iS1607 Series User Manual

STP-iS1607 Series Turbomolecular Pump
MT-94E-001-C
Page 89
5
SERIAL COMMUNICATION PROTOCOL
Next, the preceding SIM->PC character is "Ack", the PC continues instructing the control command
(the 2nd block).
PC->SIM
@
F
1
F
2
Stx
0
0
2
C
254
C
n
Etx
LRC
SIM->PC
Ack or Nak
F
1
F
2
Always assign less than 510 characters (n< 510) to the parameter so that the message is less than
512 characters.
Then the preceding SIM->PC character is "Ack", the instructed control command is executed and the
SIM returns the following response.
PC->SIM
Ack or Nak
F
1
F
2
SIM->PC
@
F
1
F
2
Stx
0
0
1
# or !
Etx
LRC
The PC transmits "Ack" or "Nak"; then transmits the next command if necessary.
5.3.10 Query command in the RS485 multi-point connection
The query command to be used when a pump operation instruction or a setting change instruction is
transmitted from the SIM and is arranged in the order specified below. The top is "?" (HEX code "3F")
and ASCII characters corresponding to the respective function code and parameter follow.
?
CHR
C
1
C
2
C
n
CHR: Function code character, C
1
to C
n
: Parameter.
Parameter (from C
1
to C
n
) serves as 16 bits signed hexadecimal value coded ASCII text. When a
message (a space character, a function code, and parameter) exceeds 255 characters, input "?" and
CHR to the top transmission block only (the first transmission block of the transmission frame). It is
not necessary to input them to the second and succeeding transmission blocks.
The SIM returns the acknowledgment response character "#" when the query command is processed
normally. If not, the SIM returns the non-acknowledgment response character "!" and 3 characters of
the non-acknowledgment code are added to "!".
Transmission frame when data is transmitted from one block and returned to two blocks.
Designate a query command on the PC.
<- Less than 256 chr.->
PC->SIM
@
F
1
F
2
Stx
0
0
1
?
CHR
C
1
C
n
Etx
LRC
SIM->PC
Ack or Nak
F
1
F
2

Edwards STP-iS1607 Series Specifications

General

Brand	Edwards
Model	STP-iS1607 Series
Category	Water Pump
Language	English

Summary

Instruction Manual

Declaration of Conformity

Additional Legislation and Compliance Information

RoHS, REACH, and Waste Framework Directive

Details compliance with RoHS, REACH regulations, and waste framework directives.

China Material Content Declaration

Introduction to the STP Pump

Scope, Definitions, and Safety Symbols

Defines the manual's scope, terms, and presents IEC warning symbols.

Safety Information: Warnings and Cautions

Explains the meaning and usage of WARNING and CAUTION instructions.

Electromagnetic Compatibility and Warranty

Details EMC compliance requirements and the product's limited warranty.

Disclaimer and Spare Parts

Lists warranty disclaimers and information on obtaining spare parts.

Precautions for Safe Operation

Usable Gases and Safety Precautions

Specifies usable gases and safety measures for handling them.

Pump Labels and Identification

STP Pump Installation and Hot Surface Labels

Describes warning labels for installation and hot surfaces.

Heavy Product, High Voltage, and Rotation Labels

Details labels for heavy products, high voltage, and rotation direction.

Operation Principle and Pump Specifications

Core Operating Principles and Features

Explains the pump's operation and features like oil-free, low vibration.

STP Pump Specifications and Naming Conventions

Details pump model specifications and naming conventions.

Technical Data

STP Pump Specifications Table

Provides detailed specifications for different STP pump models.

Maximum Gas Flow Rate

Lists the maximum gas flow rates under various conditions.

Water Cooling Requirements

Specifies the conditions for using cooling water.

Control Unit Specifications

Details electrical specifications and indicators for the control unit.

External Pump Appearance and Dimensions

Shows external views and dimensional data for STP pump models.

Label Affixing Positions

Illustrates the locations of various labels on the STP pump.

Installation Procedures

Pre-Installation Precautions and Environment

Covers essential precautions and operating environment requirements.

Unpacking, Lifting, and Handling

Provides guidance on unpacking and safely lifting the STP pump.

Pump Mounting and Securing Methods

Details different mounting positions and securing techniques.

Power Cable and Vacuum Piping

Covers power cable connection and vacuum piping precautions.

N2 Purge Gas and Water Cooling Connection

Explains N2 purge gas introduction and water cooling pipe connection.

Baking Heater and Semiconductor Connection

Details baking heater attachment and semiconductor equipment connection.

Pump Operation

Gas Pumping and Purge Procedures

Covers gas pumping steps and purge gas introduction.

Cooling and Baking Procedures

Details the water-cooling method and baking the STP pump.

Pre-Start Checks and System Confirmation

Outlines checks required before starting the STP pump.

Powering On and Pump Operation Setup

Describes powering on the unit and setting operation ports.

Starting, Stopping, and Powering Off

Provides procedures for starting, stopping, and powering off the pump.

LED Status Indicators

Explains the meaning of the pump's LED indicators.

Parallel Port Input/Output Signals

Details input and output signal configurations for the parallel port.

Second Speed Option Control

Explains the second speed option and its function.

Serial Communication Protocol

Introduction and COM1 Connection Setup

Introduces serial communication and COM1 connection via X3 connector.

RS485 Connection and Parameter Settings

Covers RS485 connections and communication parameter configuration.

Cable Installation Recommendations

Provides recommendations for installing communication cables to reduce noise.

Protocol Specifications Overview

Gives a general description of the serial communication protocol.

Command, Query, and Broadcasting Formats

Details formats for control, query, and broadcasting commands.

Application Notes and Process Examples

Provides application notes and examples for communication processes.

Specific Command Details (ReadMeas, Command, etc.)

Details specific commands for reading data and controlling the pump.

STP-Link and Display Unit Overview

STP-Link Software Functions

Lists the functions and capabilities of the STP-Link application.

Display Unit Operation and Features

Describes the operation and features of the display unit.

Safety Functions

General Safety Functions Overview

Introduces the pump's safety functions and power failure handling.

Specific Failure Conditions

Details specific failure conditions like overheating and vibration.

"WARNING" Function Overview and Settings

Explains the warning function and how to configure its settings.

Troubleshooting Immediate Actions and LED Indications

Provides steps for immediate troubleshooting and LED failure indications.

Error List and Failure Diagnosis

Lists potential errors and provides guidance for diagnosis.

Maintenance and Inspection

General Maintenance and Inspection Guidelines

Outlines general safety precautions for maintenance and inspection.

Cleaning and Deposit Inspection Procedures

Details cleaning methods and procedures for inspecting internal deposits.

Overhaul Intervals and Parts Replacement

Recommends overhaul intervals and standard replacement parts.

Transporting for Repair or Overhaul

Provides instructions for safely transporting the pump for service.

Storage and Disposal

STP Pump Storage Guidelines

Provides precautions for storing the STP pump over long periods.

Pump Disposal Procedures

Outlines procedures for safely disposing of the STP pump.

Service, Spares, and Accessories Overview

Service Options and Support

Describes the service options and worldwide support network.

Spare Parts and Accessories

Provides information on ordering spare parts and accessories.

Available Accessories for STP Pump