STP-iS1607 Series Turbomolecular Pump
SERIAL COMMUNICATION PROTOCOL
5.4 Command specifications
5.4.1 Command list
Reads the measured rotational speed.
Sends commands START, STOP, RESET (These
commands are valid only when being sent to the serial
port which is set as the input operation port.)
Reads the errors being detected.
Reads the pump operation mode and the errors being
detected.
Reads the software version.
Reads serial number, running time and start counter.
Reads the setting values of the speed set point and the
TMS temperature.
Reads the measured motor temperature.
Reads the various settings.
(Remote mode, TMS function, and emergency vent
valve).
Changes the speed set point.
*1
Reads the speed set point.
Reads the pump operation mode, the errors and the
warnings being detected
Reads the TMS temperature, motor temperature, motor
current, measured rotational speed, and control unit
temperature.
Reads each setting value of items
Changes each setting value of items
*1
Reads pump model and damage point
Reads the error record with detection
time
Changes optional function (Second speed option)
*1
Reads optional function (Second speed option)
Table 22 - Command list
*1
There is an endurance limit of setting changes (no more than 24 times per day for about ten years). If this limit is exceeded,
it not only may become impossible to change the setting but can also cause pump failure. Do not make setting changes in
excess of this endurance limit.
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