Edwards STP-iS1607 Series User Manual

STP-iS1607 Series Turbomolecular Pump
MT-94E-001-C
Page 21
3
INSTALLATION OF THE STP PUMP
3 INSTALLATION OF THE STP PUMP
3.1 Precautions before installation
Installation, operation and maintenance must only be executed by personnel who read through this
Manual carefully and have the specific skills to perform installation, operation and maintenance of the
STP pump.
3.1.1 Operating environment
WARNING
To prevent an accident, confirm the characteristics of gases to be used, referring to
the Material Safety Data Sheet (MSDS) you obtain from the gas supplier, and, keep
MSDS and a safety advice of gas supplier.
WARNING
Take measures according to MSDS to prevent an accident when using toxic,
reactive or combustible gases. Dilute the gas to be used with the inert gas controlled
if necessary. And, take measures according to MSDS to prevent an accident caused
by exhaust gas.
CAUTION
Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the
following gases, contact Edwards:
• Gases including alkaline metals except Li gas.
• Gases including Ga, Hg, In, or Sn.
• HBr gas.
Non-corrosion resistant pump cannot use the above gases including chlorine and fluorine system
gases.

Edwards STP-iS1607 Series Specifications

General

Brand	Edwards
Model	STP-iS1607 Series
Category	Water Pump
Language	English