Edwards STP-iS1607 Series - Water Cooling Requirements

STP-iS1607 Series Turbomolecular Pump
MT-94E-001-C
Page 14
2
TECHNICAL DATA
2.3 Water cooling use condition
Use cooling water which fulfills the following conditions.
Item
Specification
Port type
Rc 1/4 (Female)
Flow rate
L/min
3
Water temperature
°C
15 to 35
*1
Water pressure
MPa (kgf/cm
2
)
0.3 (3)
Maximum grain size
mm
2
0.03
pH
6.5 to 8.0
Water hardness
mg/L
100
Resistivity
kΩ･cm
4 to 1,000
Turbidity
FNU
< 30
*1
Maximum gas flow-rate differs according to the cooling water
temperature. (refer to Section 2.2)