EasyManua.ls Logo

Edwards STP-iS1607 Series - Baking the STP Pump

Edwards STP-iS1607 Series
173 pages
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
STP-iS1607 Series Turbomolecular Pump
MT-94E-001-C
Page 55
4
OPERATION
4.3 Baking the STP pump
WARNING
The surfaces of the STP pump and its peripheral equipment will become extremely
hot. Never touch them with bare hands.
To attain a less pressure in a shorter time and reduce the exhaust time, bake the vacuum equipment
and STP pump.
When baking the STP pump, always cool it to prevent overheating.
Start baking after cooling is started.
Set the temperature of the baking heater to 120 °C or less.
DO NOT introduce gases during baking, or this will prevent overheating.
To exhaust the gas discharged from the vacuum equipment and the inner wall of the STP pump, run
the STP pump during baking.

Table of Contents

Related product manuals