Edwards STP-iS1607 Series User Manual

STP-iS1607 Series Turbomolecular Pump
MT-94E-001-C
Page 11
2
TECHNICAL DATA
2 TECHNICAL DATA
2.1 STP pump specifications
The values shown below are typical. They are not guaranteed.
Item
STP-iS1607
STP-iS1607C
STP-iS1607B
STP-iS1607S
STP-iS1607CS
STP-iS1607BS
Flange size
Inlet port flange
ISO160F
VG150
ICF203
ISO200F
VG200
ICF253
ISO250F
ISO160F
VG150
ICF203
ISO200F
VG200
ICF253
ISO250F
Outlet port flange
KF40
Pumping speed
N
2
L/s
1,000
1,600
1,000
1,600
Ar
L/s
1,000
1,600
1,000
1,600
H
2
L/s
600
800
600
800
Compression ratio
N
2,
Ar
>10
8
H
2
6.0×10
2
Ultimate pressure
Pa (Torr)
10
-7
(10
-9
) [after baking]
Allowable flow backing pressure
*1
Pa (Torr)
160 (1.2)
Maximum backing pressure
*2
Pa (Torr)
240 (1.8)
Critical operating backing
pressure
*3
Pa (Torr)
440 (3.3)
Rated speed
rpm
36,500
Backup rotational speed
*4
rpm
Approximately 6,000
Starting time
min
≦8
Stopping time
min
≦9
Noise
dB
45 (at 36,500 rpm)
Baking temperature
°C
<120
Lubricating oil
Not necessary
Installation position
Free
Cooling method
Water cooling
Mass
*5
kg
48
Ambient temperature range
°C
0 to 40
Storage temperature range
°C
-25 to 55

Edwards STP-iS1607 Series Specifications

General

Brand	Edwards
Model	STP-iS1607 Series
Category	Water Pump
Language	English