EasyManua.ls Logo

Edwards STP-iS1607 Series - Vacuum Piping Method

Edwards STP-iS1607 Series
173 pages
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
STP-iS1607 Series Turbomolecular Pump
MT-94E-001-C
Page 48
3
INSTALLATION OF THE STP PUMP
3.5.1 Vacuum piping method
1. Attach the inlet port to the high vacuum side.
(Refer to Section 2.1, "STP pump specifications" for maximum working pressure).
2. Attach the outlet port to the inlet port flange of the backing-pump (primary side pump).
(Refer to Section 2.1, "STP pump specifications" for allowable backing pressure).
Note: Maximum flow for water cooled is applicable under the condition listed in Section 2.3, "Water
cooling use condition".

Table of Contents

Related product manuals