STP-iS1607 Series Turbomolecular Pump
SERIAL COMMUNICATION PROTOCOL
The number of
"Error Record"
8-bits hexadecimal
coded ASCII
Error Record 1 to
Error Record 10
8-bits hexadecimal
coded ASCII
*1
Value corresponding to the error message is transmitted (refer to Table 24 and Table 25). The most recent error has the
smallest parameter number. When the number of errors being detected is under the maximum number, the value of
parameter that is larger than the number of errors has been detected is set to 0.
Example:
When 3 errors have been detected in the past;
The number of "Error Record"
: 0F
hex
= 15 = Disturbance Xb
: 0D
hex
= 13 = Disturbance Xh
: 12
hex
= 18 = T.Cable Disconnected
: 00
hex
= No error recorded
5.4.12 SetSpeedSetPoint
Function: Changes the "Speed Set Point" value. This value can be changed the range from 18,500 to
36,500 rpm. The threshold value of the illumination pattern of the "ROTATION" LED is fixed. It is not
changed even if the setting value of the rotational speed is changed.
CAUTION
There is an endurance limit of setting changes (no more than 24 times per day for about ten years).
If this limit is exceeded, it not only may become impossible to change the setting but can also cause
pump failure. Do not make setting changes in excess of this endurance limit.