CONTENTS
Section Title Page
1 INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Electromagnetic compatibility 2
1.3 Limited warranty 2
1.3.1 Item warranted 2
1.3.2 Disclaimer 3
1.3.3 Spare parts 3
1.4 Precautions for safe operation of the STP pump 4
1.4.1 Usable gases 4
1.5 Maintenance and inspection precautions 5
1.6 Labels 5
1.7 Operation principle of the STP pump 7
1.8 STP pump specification 9
2 TECHNICAL DATA 11
2.1 STP pump specifications 11
2.2 Maximum gas flow-rate 13
2.3 Water cooling use condition 14
2.4 Control unit 15
2.5 External appearance of the STP pump 17
2.6 Label affixing positions 19
3 INSTALLATION OF THE STP PUMP 21
3.1 Precautions before installation 21
3.1.1 Operating environment 21
3.1.2 Installation area 23
3.1.3 Bench 24
3.1.4 Insulation test 24
3.2 Unpacking and installation 25
3.3 Name and function of each part 29
3.3.1 Name and function of the pump 29
3.3.2 Name and function of the control unit 30
3.4 How to install the STP pump 34
3.4.1 Cleaning the seal 35
3.4.2 STP pump installation positions 36
3.4.3 Secure the STP pump 37
3.4.4 Legs for securing the base 42
3.4.5 Power cable 43
3.4.6 How to connect the power cable 45
3.5 Precautions of vacuum piping 47
3.5.1 Vacuum piping method 48
3.6 Introducing N
2
gas
(for the STP pump equipped with purge port) 49
3.7 Connecting the water cooling pipe 50
3.8 Attaching a baking heater 51
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