CONTENTS (CONTINUED)
Section Title Page
3.9 Connecting to semiconductor equipment 52
3.9.1 Connecting to power 52
3.9.2 Emergency off circuit (EMO circuit) 52
4 OPERATION 53
4.1 Gas pumping, cooling and baking the STP pump 53
4.1.1 Gas pumping 53
4.1.2 How to introduce a purge gas 54
4.2 Cooling the STP pump 54
4.2.1 Water-cooling method 54
4.3 Baking the STP pump 55
4.4 Before starting the STP pump 56
4.4.1 Confirmation before starting 56
4.4.2 Confirmation of vacuum system 56
4.5 Powering ON 57
4.6 Pump operation 57
4.6.1 Input operation port setting 57
4.6.2 Starting/stopping the STP pump 58
4.7 How to start/stop the STP pump 59
4.7.1 Starting the STP pump after stopping 59
4.7.2 Starting the STP pump after a safety function operates 59
4.7.3 Powering OFF 59
4.8 LED 60
4.9 Parallel port input/output signal 61
4.9.1 Input signal pins 61
4.9.2 Input operation port setting 64
4.9.3 Second speed option 65
4.9.4 Output signal pins 66
5 SERIAL COMMUNICATION PROTOCOL 71
5.1 Introduction 71
5.2 Connection and setting up 72
5.2.1 Signal connection 72
5.2.2 Connecting the RS485 74
5.2.3 Communication parameter setting 75
5.2.4 Input operation port setting 76
5.2.5 Serial communication timeout setting 77
5.2.6 Recommended items about communication cable installation 78
5.3 Protocol specifications 81
5.3.1 General description 81
5.3.2 Standard transmission frame
(in the RS232/RS485 single point connection) 82
5.3.3 Control command
(in the RS232/RS485 single point connection) 83
5.3.4 Query command
(in the RS232/RS485 single point connection) 84
5.3.5 Transmission data format 85
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