3.6 Introducing N
2
gas (for the STP pump equipped with purge port)
When pumping reactive or corrosive gas, gas including hydrogen, introduce a dry N
2
gas or other gas
into the STP pump in order to protect the inside of the STP pump. To isolate (Lockout/Tagout) the
purge gas N
2
, introduce a dry N
2
gas through the electromagnetic vent. valve, needle valve or similar
valve (must be prepared by the customer) from the purge port.
When exhausting a gas which has low heat conductivity such as Ar gas, the temperature of rotor
blade will increase. Introduce a dry N
2
gas into the STP pump through the purge port in order to
decrease the temperature of rotor blade and exhaust the large amount of Ar gas.
For instructions on how to introduce the purge gas, see Section 4.1.2.
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