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Edwards STP-iS1607 Series User Manual

Edwards STP-iS1607 Series
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STP-iS1607 Series Turbomolecular Pump
MT-94E-001-C
Page 49
3
INSTALLATION OF THE STP PUMP
3.6 Introducing N
2
gas (for the STP pump equipped with purge port)
When pumping reactive or corrosive gas, gas including hydrogen, introduce a dry N
2
gas or other gas
into the STP pump in order to protect the inside of the STP pump. To isolate (Lockout/Tagout) the
purge gas N
2
, introduce a dry N
2
gas through the electromagnetic vent. valve, needle valve or similar
valve (must be prepared by the customer) from the purge port.
When exhausting a gas which has low heat conductivity such as Ar gas, the temperature of rotor
blade will increase. Introduce a dry N
2
gas into the STP pump through the purge port in order to
decrease the temperature of rotor blade and exhaust the large amount of Ar gas.
For instructions on how to introduce the purge gas, see Section 4.1.2.
STP-iS1607
STP-iS1607S
K1/K2
Height of purge port
Inlet port flange
ICF203
ISO160F
VG150
ICF253
ISO200F
VG200
ISO250F
K1
335
335
335
333
295
295
295
K2
335
335
335
333
295
295
295
Figure 26 - Height of purge port

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Edwards STP-iS1607 Series Specifications

General IconGeneral
BrandEdwards
ModelSTP-iS1607 Series
CategoryWater Pump
LanguageEnglish

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