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Edwards STP-iS1607 Series - External Appearance of STP-Is1607 S;Is1607 Cs;Is1607 Bs

Edwards STP-iS1607 Series
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STP-iS1607 Series Turbomolecular Pump
MT-94E-001-C
Page 18
2
TECHNICAL DATA
Figure 8 - External appearance of STP-iS1607S/iS1607CS/iS1607BS
No.
Item
Description
1
Center of gravity
2
Height of water cooling port
Rc1/4
3
Control unit
4
Outlet port flange
KF40
5
Screw hole for securing the base
4-M8, Depth 20
6
Purge port
Plug/KF10
Inlet port flange
ICF203
ISO160F
VG150
ICF253
ISO200F
VG200
ISO250F
φA
203
225
235
253
285
300
335
φB
22
15
15
25
16
16
16
C (1)
228
224
222
220
192
190
186
D
430
430
430
428
390
390
390
E
20
20
20
20
20
20
20
φF
181
200
210
231.8
260
270
310
G
22.5º
22.5º
15º
15º
22.5º
15º
H
20-φ8.4
8-φ11
8-φ12
24-φ8.4
12-φ11
8-φ15
12-φ11
I (4)
263
263
263
261
223
223
223
J (2)
319
319
319
317
279
279
279
K (6)
335
335
335
333
295
295
295

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