Edwards STP-iS1607 Series - Configuration of the STP Pump; Control Unit (Front Panel); Pump Functions; Name and Function of each Part

STP-iS1607 Series Turbomolecular Pump
MT-94E-001-C
Page 29
3
INSTALLATION OF THE STP PUMP
3.3 Name and function of each part
3.3.1 Name and function of the pump
The STP pump in Figure 16 is the STP-iS1607S. Refer to Section 2, "TECHNICAL DATA".
Figure 16 - Configuration of the STP pump
Item
Description
Function
1
Inlet port flange
Connected to the vacuum equipment (at the high vacuum side).
2
Outlet port flange
Connected to the inlet port side of the backing-pump.
3
Cooling water port
Connected to the STP pump cooling water pipe.
4
Control unit
Contains the electronics that control the pump. Refer to Section
3.3.2, "Name and function of the control unit, for details.
5
Purge port
(only specification with
purge port)
Introduces a purge gas.
In order to protect the inside of the STP pump when pumping
reactive or corrosive gas, gas including hydrogen.
6
Adapter plate (option)
The bolt pitch on the bottom is compatible with STP-iXR1606.
Table 3 - Pump functions
1
2
3
4
5
3
6
6