Edwards STP-iS1607 Series - Maximum Gas Flow Rate

STP-iS1607 Series Turbomolecular Pump
MT-94E-001-C
Page 13
2
TECHNICAL DATA
2.2 Maximum gas flow-rate
*1
Cooling
water
Gas
Purge gas
flow rate
*2
Back pump
> 1,300 L/min
> 10,000 L/min
To 25 ºC
N
2
Pa·m
3
/s
(SCCM)
N/A
3.72
(2,200)
4.89
(2,900)
Ar
Pa·m
3
/s
(SCCM)
1.86
(1,100)
1.86
(1,100)
To 25 ºC
N
2
Pa·m
3
/s
(SCCM)
8.4×10
-2
±1.7×10
-2
(50±10)
3.72
(2,200)
4.89
(2,900)
Ar
Pa·m
3
/s
(SCCM)
1.86
(1,100)
1.86
(1,100)
*1
The maximum gas flow-rate is applicable under conditions that N
2
or Ar gas is vacuumed continuously. It is changed
depending on condition. For example, when the gas is exhausted intermittently, the gas more than the maximum gas flow-
rate can be exhausted. In this case, contact Edwards.
*2
Use the STP pump with purge ports (optional accessory) when introduce a purge gas. Refer to Section 3.6, "Introducing N
2
gas (for the STP pump equipped with purge port)" for the connection method of purge ports.