*1
Allowable flow backing pressure is the pressure when N
2
gas is continuously exhausted using a back pump (maximum
pumping speed 1300L/min).
*2
Maximum backing pressure is the pressure when the working pressure rises suddenly without flowing gas.
*3
Critical operating backing pressure is the pressure that allows continuous operation without flowing gas.
*4
A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power
failure.
*5
Mass is a value of state that the only standard accessory was installed (except the optional accessory).
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