Edwards STP-iS1607 Series User Manual

STP-iS1607 Series Turbomolecular Pump
MT-94E-001-C
Page 148
7
SAFETY FUNCTIONS
7.6.2 Indication of "FAILURE" LED (green)
If an abnormality/error is detected by self test during the power ON operation, "FAILURE" LED
flashes in green. This is the indication of STP pump or control unit failure. Contact Service Office.
7.6.3 No Indication of the "FAILURE" LED
No.
Symptom
Probable cause
Countermeasures
Referred
Section
1
The "POWER"
LED does not
illuminate.
Incorrect connection of
power cable
Connect the power cable correctly.
3.4.5
3.4.6
Abnormal power voltage
Set the input voltage to the rated
voltage ±10 %.
2.4
Power failure
Check whether or not a power failure
has occurred.
7.1.1
Insufficient cooling
Make sure that the STP pump is cooled.
2.3
2
The
"ROTATION"
LED does not
flash after
performing the
start operation.
Failure of the "Input
Operation Port" setting.
Set the input operation port correctly.
4.9
3
Insufficient
ultimate
pressure.
Failure of the backing-
pump.
Check the capacity and starting state
(use a backing-pump having more
capacity that we specified).
3.5
Leakage of the piping
system.
Check the piping system for leakage.
3.5
Residual molecules.
If the main composition is H
2
or H
2
O,
perform baking; if it is other gases,
clean the inside of the vacuum
equipment (If gases remain inside the
STP pump, contact Service office when
it is needed to be cleaned).
4.3
4
Abnormal noise
is generated
while the pump
is rotating
External vibration or
impact
Remove external vibration so as not to
transmit it to the STP pump.
3.1.1
Table 43 - Troubleshooting with no indication of the "FAILURE" LED

Edwards STP-iS1607 Series Specifications

General

Brand	Edwards
Model	STP-iS1607 Series
Category	Water Pump
Language	English