Edwards STP-iS1607 Series User Manual

STP-iS1607 Series Turbomolecular Pump
MT-94E-001-C
Page 147
7
SAFETY FUNCTIONS
Referred
Section
5.2.5
*1
The driver output stops and the rotor continue rotating by inertia.
It may take several hours to stop.
To stop the STP pump quickly, close the vacuum valve at the outlet port
flange and introduce gas from the purge port into the STP pump.
Table
42 - Error List
(continued)
Countermeasures
Contact Service office.
1. Send
a communication
command periodically at intervals of less than setting value
.
2. Check the communication
cable.
3. Contact Service office.
Contact Service office.
Overhaul is needed
.
Contact Service office.
Probable causes
Failure of the
control unit.
1. Insufficient user
application setting
.
2. Disconnection
or break
of
the communication cable.
3. Failure of the
control unit.
Failure of the
control unit.
Frequency of "Disturbance"
or
"Power
Failure" error
.
Occurrence
condition
Abnormal power circuit
.
Communication failure of the input operation port during acceleration
and
normal operation
Abnormal rotatinal speed detection
Damage point excees setting value
Pump operation
Free run
*1
Decelerat
e and
stop
Free run
*1
Decelerat
e and
stop
(Error
message
)
Power Supply Fail
Serial Com. Fail
Speed Pulse Lost
START NOT ALLOWED
"FAILURE"
LED
Steady
red

Edwards STP-iS1607 Series Specifications

General

Brand	Edwards
Model	STP-iS1607 Series
Category	Water Pump
Language	English