Edwards STP-iS1607 Series User Manual

STP-iS1607 Series Turbomolecular Pump
MT-94E-001-C
Page 146
7
SAFETY FUNCTIONS
Referred
Section
7.1.1
3.4.5
3.4.5
2.4
3.5
*1
The magnetic bearing output stops and the rotor is descended on the touch down bearing.
*2
The driver output stops and the rotor continue rotating by inertia.
It may take several hours to stop.
To stop the STP pump quickly, close the vacuum
valve at the outlet port flange and introduce gas from the purge port into the STP pump.
Table
41 - Error List
(continued)
Countermeasures
Contact Service office.
Contact Service office.
Contact Service office.
1. Check whether or
not a
power failure has occurred.
2. Connect the power cable
correctly.
3. Replace the power cable.
4. Set the
rated
voltage ±
10 %.
1. Check the volume of water
and water temperature with water cooling unit.
In order
to recover, turn off the power (switch "OFF"), and then switch "ON" after sufficient cooling of the control
unit.
(isolate input power supply 3 minutes or more
)
2. Contact Service office.
Probable causes
1. Failure of the STP
pump.
2. Failure of the
control unit.
Disconnection of the
motor
temperature
sensor
.
Failure of the
control unit.
1. Power failure
.
2. Incorrect connection of the
power cable.
3. Failure of
the power cable.
4. Failure of the power
supply vlotage.
1. Insufficient cooling of the
control unit
.
2. Failure of
the control unit.
Occurrence
condition
Excessive magnetic bearing electric current continues for 30 sec.
Abnormal
motor
temperature detection
Rotaional speed exceeds rated speed
Insufficient power supply
Overheat inside the control unit
.
Pump operation
Touch down
*1
Decelerat
e and
stop
Free run
*2
Decelerat
e and
stop
(Error
message
)
Inordinate Current
M_Temp Lost
Overspeed 1, 2, 3, 4
Power Failure
"FAILURE"
LED
Steady
red

Edwards STP-iS1607 Series Specifications

General

Brand	Edwards
Model	STP-iS1607 Series
Category	Water Pump
Language	English