Edwards STP-iS1607 Series User Manual

STP-iS1607 Series Turbomolecular Pump
MT-94E-001-C
Page 145
7
SAFETY FUNCTIONS
Referred
Section
4.4.2
*1
The driver output stops and the rotor continue rotating by inertia.
It may take several hours to stop.
To stop the STP pump quickly, close the vacuum valve at the outlet port flange and introduce gas from the purge port into the
STP pump.
Table
40 - Error List
(continued)
Countermeasures
Check the vacuum piping system for leakage. Check the exhaust sequence. Turn "OFF" the switch to stop the pump, and then turn "ON" the switch again to recover.
Contact Service office.
1. Perform rotational
operation
after resetting.
2. Contact Service office.
Contact Service office.
Contact Service office.
Contact Service office.
Contact Service office.
Contact Service office.
Probable causes
Atmospheric air flows the STP pump
.
Failure of the
control unit.
1. Malfunction by external
noise
.
2. Failure of the
control unit
.
Failure of the
control unit.
Failure of the
control unit.
Failure of the
control unit.
1. Short
-circuit or ground
fault in the
motor
winding
.
2. Failure of the
control unit.
Failure of the
control unit.
Occurrence
condition
Rotational speed increases
in brake
or Levitation state
The rotation
does
not stop after 30 min. into brake state
Accelerate up to 2000 rpm or less
.
Communication failure
in the
control unit
Communication failure with m
otor
driver
Abnormal
motor
driver operation
.
Motor driver over current
Motor driver over voltage
Pump operation
Free run
*1
Free run
*1
Decelerate and stop
Decelerate and stop
Decelerat
e and
stop
Decelerat
e and
stop
Free run
*1
Free run
*1
(Error
message
)
Aberrant Accel
Aberrant Brake
Accel Malfunction
AMB Com. Failure
DRV Com. Failure
DRV Failure
DRV Overcurrent
DRV Ove
rvoltage
"FAILURE"
LED
Steady
red

Edwards STP-iS1607 Series Specifications

General

Brand	Edwards
Model	STP-iS1607 Series
Category	Water Pump
Language	English