Edwards STP-iS1607 Series - Page 158

STP-iS1607 Series Turbomolecular Pump
MT-94E-001-C
Page 144
7
SAFETY FUNCTIONS
Referred
Section
3.1.1
2.3
4.1
4.1
4.4.2
4.4
Table 39 - Error List
(continued)
Countermeasures
1. Set the ambient
temperature to 40
°C or
less.
2. Set the
cooling water flow
rate at 3 L/min and cooling water
temperature
between
15 to 35
°C.
1. Set the temperature of the
baking heater to 120
°C or
less.
2. Always cool the STP pump.
3. Check the piping system for
leakage.
4. Repetitious start/stop
operations may cause the STP pump to overheat.
Probable causes
1. High ambient temperature
.
2. Insufficient cooling of the
control unit
.
1. Overheating during
baking
.
2. Insufficient cooling
.
3. Leakage of the vacuum
piping system
.
4. Repetiti
ve start/stop
operations
.
Occurrence
condition
Overheating inside the
control
unit
Overheating inside the STP pump
Pump operation
Decelerat
e and
stop
Decelerat
e and
stop
(Error
message
)
CNT Overheat 1, 2
MOTOR Overheat
"FAILURE"
LED
3 flashes in red