Edwards STP-iS1607 Series User Manual

STP-iS1607 Series Turbomolecular Pump
MT-94E-001-C
Page 143
7
SAFETY FUNCTIONS
Referred
Section
3.4.4
3.5
3.4.1
2.1
2.1
4.4.2
2.1
Table
38 - Error List
Countermeasures
1. Remove external vibration
so as not to transmit it to the STP pump.
2. Check the vacuum piping.
3. Install the STP pump in a
way that no foreign materials fall into the STP pump.
4. Perform
roughing vacuum
through bypass root.
Contact Service office.
1. Use the maximum working
pressure or less.
2. Use the allowable backing
pressure or less.
3. Check the vacuum piping
system for leakage.
4. Check th
e backing
-pump
for its capacity and START state. (use a
backing
-pump
with
the recommended capacity or more)
Probable causes
Excessive vibration applied externally to the STP pump:
1. External vibration/impact
.
2. Atmospheric air flows
into
the STP pump
.
3. Foreign materials fall into
the STP pump
.
4. Sudden pressure change
at start of
roughing
vacuum by backing
-pump
.
Abnormal magnetic bearing:
1. Control circuit error.
2. Disconnection of the
internal wiring
.
1. High pressure at the inlet
port.
2. High pressure at the outlet
port.
3. Leakage of the piping
system
.
4. Failure of the
backing
-
pump
.
Occurrence
condition
Excessive imbalance
Acceleration
state
continues for approx.
30
minutes
Pump operation
Decelerat
e and
stop
Decelerat
e and
stop
(Error
message
)
Disturbance X_H Disturbance Y_H Disturbance X_B Disturbance Y_B Disturbance Z
DRV Overload
"FAILURE"
LED
1 flash in red
2 flashes in red

Edwards STP-iS1607 Series Specifications

General

Brand	Edwards
Model	STP-iS1607 Series
Category	Water Pump
Language	English