• An area free of externally applied mechanical shock.
• A place free of a heat source (Keep clear of the heat source or
attach a thermal shield plate).
• A place free of a strong magnetic field (Range: up to 15 mT (150
G) in the axial direction, and up to 3 mT (30 G) in the radial
direction with respect to the rotational axis of the STP pump).
• A place free of a strong electric field.
• A place free of exposure to radiation.
• No discharge of high voltage (more than 500 V) (If more than
500 V is discharged, contact Edwards).
• A place at an altitude of 2,000 m or less.
• A place indoors.
• Others: An area free of exposure to direct sunlight, high
humidity, dust, water drop, salty air, explosive or flammable gas,
corrosive gas, excessive vibration and sources of electric noise.
Install the STP pump securely so that foreign materials cannot fall
into the STP pump (Ex.: Si wafers or samples are positioned
above the STP pump) (To prevent foreign materials from falling
into the STP pump, design a shield plate with large conductance).
Install the STP pump so that the inlet flange of the STP pump not to
be exposed to heat source. (Install the heat shield plate so as to
prevent the effect by radiation heat)
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