STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page 37
INSTALLATION
3
The generated destructive torque depends on the presence of a torque reduction mechanism that
can be built into the flange, according to the pump model and flange type. This mechanism, shown in
Figure 21, is designed to absorb energy and also buffer the destructive torque.
Note that special washers will be required if the pump includes the inlet torque reduction mechanism.
The washer shape is shown in Figure 21.
Moreover, there are two installation methods for the pump, as shown in Figure 22. Make sure to
secure the inlet port flange of the pump with the recommended bolts, as described in Figure 22,
according to the installation method used.
CAUTION
Install the flange securing bolts in the proper position with the special square washer shown in
Figure 21. Failure to do so may cause abnormal operation of the torque reduction mechanism and
damage the pump.
CAUTION
When any internal abnormality/error results in high rotational torque, causing the torque reduction
mechanism to operate, the pump may rotate a maximum of 5 degrees around the rotor rotation at
axis.
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