STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page 38
INSTALLATION
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1. Vacuum equipment
2. Inlet port flange
3. Washer
4. Torque reduction mechanism
5. Bolt insert position
Figure 21 - Bolt position for securing the flange
(i) When the base is
not secured
(ii) When the base is secured
1. Recommended fitting bolt for flange
2. Secure the base (legs)
Figure 22 - Methods of securing the STP pump
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3
1