HEIDELBERG MLA150 User Manual

MLA150
6 Job Setup
User Guide 51
Alignment Procedure
In the Alignment panel:
If the template _Manual.xml for manual setup of the alignment cross
coordinates was chosen, select Top Surface for top side alignment or Back
Surface for back side alignment from the dropdown list. The other templates
already contain this information.
Choose a camera from the Stage and Camera Control panel:
Top Surface
Back Surface
Field of view
Field of view
Low Res
640 µm x 480
BS Low Res
min. 364 x 274 µm
High Res
190 µm x 140 µm
BS High Res
min.172 x 130 µm
Overview*
20 mm x 20 mm
*Overview cannot access the entire surface of the substrate due to mechanical
limits.
From the Alignment Mode dropdown list choose between Cross Alignment and
Manual Alignment. This selection can be made for very single cross position.
Note:
Using the High Res/ BS High Res camera for alignment is
recommended whereas the Overview camera is not useful for
alignment procedures.

HEIDELBERG MLA150 Specifications

General

Brand	HEIDELBERG
Model	MLA150
Category	Mask Aligners
Language	English