Hitachi TM3000 - Page 4

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● First, please read the sections on “IMPORTANT” and “For the Safe Handling of the
System” provided at the beginning of this Instruction Manual.
List of Abbreviations
Abbreviations that appear frequently in this Instruction Manual and their full spellings are
given below:
PC : Personal Computer
HV : High Voltage
DFP : Diaphragm Pump
TMP : Turbo Molecular Pump
FOV : Field of View