FX-3R Maintenance Guide
3-1
DANGER
To prevent any trouble caused by accidental machine start, always
shut-down the power before starting the maintenance and
adjustment work.
The XY-axis uses a very strong magnet.
• Do not put any metallic object close to the magnet surface. Once the
magnet attracts a metallic object, this object cannot be removed due to
strong magnetic force.
• Before starting the maintenance work, take off precision portable devices,
such as a wrist watch from your body.
• Do not allow personnel who uses a precision medical device, such as an
artificial cardiac pacemaker, etc to carry out the maintenance work.
[3] PARTS AROUND THE HEAD
3-1. Replacing the Solenoid Valves
Before replacing the solenoid valves, always shut-down the main compressed air.
1) Remove the SEMS cap bolts c (×2) and SEMS cap bolts d (×2) to detach the SV cover and
cable guide.
2) Remove the SEMS cap bolts e (×2), and disconnect the cables and air tubes to detach the
solenoid valve main unit.
3) Remove the round head screws f (×2) to detach each solenoid valve. (Great care should be
taken so that the gasket on the back of the solenoid valve is not lost.)
4) Reassemble the parts and components in the reverse order of disassembly.
5) After the solenoid valves have been replaced, check the solenoid valves through the head
vacuum and the blow ON/OFF of the manual control.
∗ Round head screws f (2 pcs.) and gasket (1 pc.) are accessory parts supplied with each
solenoid valve.
Rev. 1.00
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