MKS GE50A - Page 113

To Previous Page

103

Main Page

Table of Contents5
List of References9
Mass Flow Device Safety Information11
Symbols Used in this Instruction Manual11
Symbols Found on the Unit11
Safety Procedures and Precautions11
Table 1: Definition of Symbols Found on the Unit11
Sicherheitshinweise für das Massenflussgerät13
In dieser Betriebsanleitung Vorkommende Symbole13
Erklärung der am Gerät Angebrachten Symbole13
Sicherheitsvorschriften und Vorsichtsmaßnahmen13
Tabelle 2: Bedeutung der am Gerät Angebrachten Symbole13
Informations de Sécurité Pour Appareils de Mesure/Contrôle de Débit Massique15
Symboles Utilisés Dans Ce Manuel D'utilisation15
Symboles Figurant Sur L'unité15
Mesures de Sécurité Et Précautions15
Tableau 3: Définition des Symboles Sur L'unité15
Medidas de Seguridad del Dispositivo de Flujo de Masa17
Símbolos Usados en Este Manual de Instrucciones17
Símbolos Hallados en la Unidad17
Procedimientos y Precauciones de Seguridad17
Tabla 4: Definición de Los Símbolos Hallados en la Unidad17
マスフロー機器の安全に関する情報19
本取扱説明書のマーク19
本機器のマーク19
表 5: 本機器に使⽤されているマークについて19
安全対策について20
질량 유량 장치 안전 정보23
본 지침 매뉴얼에 사용되는 기호들23
장치에 표시된 기호들23
표 6: 장치에 표시된 기호들의 정의23
안전 절차 및 예방조치24
Chapter One: General Information27
Introduction27
How this Manual Is Organized28
Customer Support29
Chapter Two: Overview31
General Information31
How the MFC Works32
Operation of the MFC with Gases Other than Nitrogen32
Chapter Three: Installation and Configuration34
Unpacking34
Product Location and Requirements35
Product Dimensions35
GE50A and GM50A - See Appendix C35
GV50A - See Appendix D35
Mounting Hardware36
Installation Procedure36
Figure 1: Serial Number Label (Sample)36
Chapter Four: Analog and Digital Interfaces39
Analog I/O Interface Cables39
Table 7: MKS Interface Cables39
Analog Interface Input and Output Options40
Table 8: Analog Interface Voltage I/O (0 to 5 VDC) - 9 Pin D Male Pinouts - Model Code a40
Table 9: Analog Interface Voltage I/O (0 to 5 VDC) - 15 Pin D Male Pinouts - Model Code B41
Digital Interface Input and Output Options43
Figure 2: Devicenet Connector Pin Diagram43
Table 10: Digital Interface - Devicenet Connector Pinout - Model Code 643
Figure 3: Devicenet Top View44
Table 11: Network (NET) Status LED Indicators44
Figure 4: Devicenet Baud Rate Switch45
Figure 5: Devicenet MAC ID Switches45
Table 12A: Profibus 9 Pin D Male Power Connector- Model Code 447
Figure 6: Profibus Top View48
Table 12B: Profibus 9 Pin D Female Communications Connector - Model Code 448
Figure 7: Profibus Station Address Switches49
Table 13: Digital Interface - RS485 Using 9 Pin D - Model Code 550
Table 14: RS485 Module Status LED Indicators50
Figure 8: RS485 Top View51
Chapter Five: Ethernet Interface Setup and Configuration54
Step 1: Install the Java™ Plug-In (for Single IP Address)54
Step 2: Setup Network for Communication through Ethernet55
Chapter Six: Embedded Web-Based GUI and Diagnostics64
Logging on to Your MFC64
Monitor Mode64
Figure 9: Embedded GUI, MFC Device Page in Monitor Mode65
Figure 10: Embedded GUI, Plot Page in Monitor Mode66
Figure 11: Embedded GUI, Configuration Page in Monitor Mode67
Figure 12: Embedded GUI, RS485 Comm Page in Monitor Mode68
Setup Mode69
Figure 13: Setup Mode (Configuration Page)69
Figure 14: Embedded GUI, Device Page in Setup Mode70
Figure 15: Embedded GUI, Creating a New Gas Instance71
Figure 16: Changing the Full Scale Flow Range71
Figure 17: Embedded GUI, Plot Page in Setup Mode72
Figure 18: Embedded GUI, Configuration Page in Setup Mode73
Figure 19: Embedded GUI, RS485 Comm Page in Setup Mode75
Figure 20: Embedded GUI, Diagnostics Page in Setup Mode76
Chapter Seven: Maintenance78
General Information78
Recalibration78
Flow Zero Adjustment78
Chapter Eight: Troubleshooting83
Troubleshooting Chart83
Table 15: Troubleshooting Chart83
Appendix A: Product Specifications89
Performance Specifications - GE50A/GV50A/GM50A89
Specifications Are Subject to Change Without Notice.mechanical Specifications - GE50A/GV50A/GM50A89
Electrical Specifications for GE50A, GM50A and GV50A90
Appendix B : Model Code Explanation for GE50A & GV50A94
Model Code Description - Elastomer Sealed Products94
Appendix C: Model Code Explanation for GM50A100
Model Code Description - GM50A - Metal Sealed Products100
Appendix D : Outline Drawings106
GE50A MFC and GM50A MFC/MFM106
GV50A MFC W/ Integral Shut-Off Valve109
Appendix D: Health and Safety Form112

MKS GE50A - Page 113

Table of Contents

Related product manuals