MKS GE50A - Page 86

Chapter Eight: Troubleshooting Troubleshooting Chart
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device.
MFC not programmed for
correct gas - actual gas used
different
Check MFC active gas using digital
interface or Ethernet GUI
MFC control parameters set
incorrectly
Contact MKS service center
MFC output slow to
respond to setpoint
Inlet pressure too low Increase inlet pressure
Actual inlet pressure lower than
pressure programmed to
device.
Adjust programmed inlet pressure
through Ethernet GUI.
MFC not programmed for
correct gas - actual gas used
different
Check MFC active gas using digital
interface or Ethernet GUI
MFC control parameters set
incorrectly
Contact MKS service center
Output signal > zero with
confirmed zero flow
condition
MFC device zero offset Re-zero device per instruction
manual
Fault in valve adjustment, gap
between plug & orifice
Contact MKS service center
DeviceNet LED
indicator (color)
State Indication
- Network status LED
Green Link OK, On-line, Connected The device in on-line and has
connection in the established state.
- For a Group 2 only device it means
that this device is not allocated to a
master.
Flashing Green On-line, Not Connected Device is on-line but has no
connection in the established state.
- The device has passed The
Dup_MAC_ID test, is on-line, but has
no established connections to other
nodes.
- For a Group 2 only device it means
that this device is not allocated to a
master.