Newport XPS - TZ Group

XPS Unified Programmer’s Manual
6.3 TZ Group
A TZ group is a 3-positioner object, like the XYZ group, but with the following
differences:
• It supports the PVT trajectories.
• It does not support 3D spline trajectories.
• It supports TZDecoupling, XYtoZZZAccelerationFeedforward and TZTracking
functionalities.
• It supports Focus process via the XPS focus interface board and focus process
module (focus.out).
• It has a specific way of initialization
(MotorDriverInterface = AnalogAccelerationTZ).
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